JPH035657B2 - - Google Patents

Info

Publication number
JPH035657B2
JPH035657B2 JP56044020A JP4402081A JPH035657B2 JP H035657 B2 JPH035657 B2 JP H035657B2 JP 56044020 A JP56044020 A JP 56044020A JP 4402081 A JP4402081 A JP 4402081A JP H035657 B2 JPH035657 B2 JP H035657B2
Authority
JP
Japan
Prior art keywords
wiring
layer
aluminum
electrode wiring
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56044020A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57159044A (en
Inventor
Shusuke Kotake
Yasuhisa Oana
Yoshiaki Komatsubara
Osamu Shimada
Nobuki Ibaraki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP4402081A priority Critical patent/JPS57159044A/ja
Publication of JPS57159044A publication Critical patent/JPS57159044A/ja
Publication of JPH035657B2 publication Critical patent/JPH035657B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4402081A 1981-03-27 1981-03-27 Semiconductor device Granted JPS57159044A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4402081A JPS57159044A (en) 1981-03-27 1981-03-27 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4402081A JPS57159044A (en) 1981-03-27 1981-03-27 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS57159044A JPS57159044A (en) 1982-10-01
JPH035657B2 true JPH035657B2 (en]) 1991-01-28

Family

ID=12679977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4402081A Granted JPS57159044A (en) 1981-03-27 1981-03-27 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS57159044A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1236962A2 (en) 2001-03-01 2002-09-04 National Agricultural Research Organisation (NARO) Freeze-dried product and process and apparatus for producing it

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6390839A (ja) * 1986-10-03 1988-04-21 Nec Corp 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152984A (en) * 1978-05-24 1979-12-01 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1236962A2 (en) 2001-03-01 2002-09-04 National Agricultural Research Organisation (NARO) Freeze-dried product and process and apparatus for producing it

Also Published As

Publication number Publication date
JPS57159044A (en) 1982-10-01

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